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Jordan Gastebois, Nathalie Coulon, Hervé Cormerais, Christophe Levallois, Eric Bêche, et al.. Low temperature PECVD processes for the fabrication of integrated symmetrical resonant UV210 Organic/Semiconductor structures. Materials Today Communications, 2024, 39 (109173), pp.1-13. ⟨10.1016/j.mtcomm.2024.109173⟩. ⟨hal-04573857⟩